Importance of Annealing Step on Dielectric Constant of ZrO2 Layer of MIM Capacitors with Al2O3/ZrO2 and ZrO2/Al2O3 Stack Structures
240th ECS Meeting / https://www.electrochem.org/240/. 2021.
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Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2021-10-28 03:35:36 +0900更新時刻: 2021-10-28 03:35:36 +0900