HOME > Presentation > Detail
(Observation of Leakage Sites in High-k Gate Stack by Using an Electron-Beam-Induced Current Technique )
IUMRS- ICEM2012. 2012.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:09:04 +0900Updated at: 2017-07-10 21:27:10 +0900