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酸化物TFTのCドープInSiOチャネル材料の研究
(Study of C-doped InSiO as a novel channel material for oxide TFT)

栗島 一徳, 生田目 俊秀, 三苫 伸彦, 木津 たきお, 塚越 一仁, 澤田 朋実, 大井 暁彦, 山本 逸平, 大石知司, 知京 豊裕, 小椋厚志.
46th IEEE Semiconductor Interface Specialists Conference. December 02, 2015-December 05, 2015.

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    Created at: 2017-02-14 11:06:57 +0900 Updated at: 2017-07-10 22:13:40 +0900

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