SAMURAI - NIMS Researchers Database

HOME > 口頭発表 > 詳細

口頭発表の表示

著者名CHEN, Jun, SEKIGUCHI, Takashi, FUKATA, Naoki, Motoyuki Sato, TAKASE, Masami, Ryu Hasunuma, Kikuo Yamabe, Keisaku Yamada, CHIKYOW, Toyohiro.
タイトルInvestigation of local leakage sites in high-k/metal gate stacks by an electron-beam-induced current technique
会議名The 8th International Nanotechnology Conference
発表年2012
言語English
外部での文献参照

▲ページトップへ移動