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(Investigation of local leakage sites in high-k/metal gate stacks by an electron-beam-induced current technique)
The 8th International Nanotechnology Conference. 2012.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:29:53 +0900Updated at: 2017-07-10 21:21:28 +0900