Growth of Ga2O3 films on Si and GaN substrates by atomic layer deposition and post-deposition annealing
| 著者 | NABATAME, Toshihide, SAWADA, Tomomi, Makoto Takahashi, Kazuhiro Ito, ONAYA, Takashi, IROKAWA, Yoshihiro, KOIDE, Yasuo, TSUKAGOSHI, Kazuhito. |
|---|---|
| 会議名 | Visual-JW 2022 & DEJI2MA-2 |
| 発表年 | 2022 |
| 言語 | English |