Control of ferroelectric phase formation in HfxZr1−xO2 thin films using nano-ZrO2 nucleation layer technique
MANA International Symposium 2021/https://www.nims.go.jp/mana/2021/index.html. 2021.
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Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2021-04-16 03:00:20 +0900更新時刻: 2021-04-16 03:00:20 +0900