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AuthorShinya Ishida, Masanori Seoka, Naoyuki Saito, Shigeki Yokono, FUKATA, Naoki, CHEN, Jun, SEKIGUCHI, Takashi, HISHITA, Shunichi, kouichi Murakami.
Titleイオン注入によるSiナノワイヤへのPドーピングと電気的活性化
(P doping and electrical activation in Si nanowires by ion-implantation)
Event name春季第56回応用物理学会学術講演会
Year of publication2009
LanguageJapanese
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