SAMURAI - NIMS Researchers Database

HOME > Presentation > Detail

Showing Presentation

AuthorKOBASHI, Kazuyoshi, NAGATA, Takahiro, NABATAME, Toshihide, YAMASHITA, Yoshiyuki, Atushi Ogura, CHIKYOW, Toyohiro.
TitleHfO2/Ge界面へのルチル型TiO2挿入によるGeOx生成の抑制
(Suppression of GeOx with rutile TiO2 Interlayer between HfO2 and Ge)
Event nameシリコン材料・デバイス研究会 (SDM)
Year of publication2013
LanguageJapanese
External references

▲ Go to the top of this page