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Pt/Al2O3/β-Ga2O3 MOSキャパシタの熱処理温度による電気特性の変化
(Change of the electrical properties as a function of annealing temperarure for )
第80回応用物理学会秋季学術講演. 2019.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2019-10-03 03:00:17 +0900Updated at: 2019-10-03 03:00:17 +0900