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超高品質因子を持つ単結晶ダイヤモンドMEMS共振子
(Ultrahigh quality factors single crystal diamond MEMS resonators)
第79回応用物理学会秋季学術講演会. September 18, 2018-September 21, 2018.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2018-09-14 16:08:47 +0900 Updated at: 2018-09-14 16:08:47 +0900