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ナノ結晶ZrO2シード層を用いた厚膜HfxZr1-xO2の強誘電性
(Ferroelectricity of thick HfxZr1-xO2 film using nano-crystal ZrO2 seed layer)
第78回応用物理学会秋季学術講演会. September 05, 2017-September 08, 2017.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-07-08 23:16:46 +0900Updated at: 2018-06-05 14:10:27 +0900