SAMURAI - NIMS Researchers Database

NIMS Award Symposium 2026

HOME > Presentation > Detail

Improvement of Fatigue Properties of Ferroelectric HfxZr1−xO2 Thin Films Using Surface Oxidized TiN Bottom-Electrode

ONAYA, Takashi, NABATAME, Toshihide, NAGATA, Takahiro, YAMASHITA, Yoshiyuki, TSUKAGOSHI, Kazuhito, Y. Morita, H. Ota, S. Migita, K. Kita.
54th IEEE Semiconductor Interface Specialists Conference. December 13, 2023-December 16, 2023.

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2024-01-09 03:11:16 +0900 Updated at: 2024-01-09 03:11:16 +0900

    ▲ Go to the top of this page