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Effect of ZrO2-seed-layer on ferroelectricity of HfxZr1-xO2 thin film for memory applications

女屋 崇, 生田目 俊秀, 栗島 一徳, 澤本直美, 大井 暁彦, 池田 直樹, 知京 豊裕, 小椋厚志.
XXVI International Materials Research Congress. August 20, 2017-August 25, 2017.

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Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2017-04-22 22:26:56 +0900Updated at: 2018-06-05 14:08:15 +0900

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