HOME > その他の文献 > 書誌詳細Electron-beam-induced current characterization of high-k dielectricsCHEN, Jun, SEKIGUCHI, Takashi, TAKASE, Masami, FUKATA, Naoki, CHIKYOW, Toyohiro, Ryu Hasunuma, Kikuo Yamabe, Motoyuki Sato, Yasuo Nara, Keisaku Yamada. Proc. of the 5th International Symposium on Advanced Science and Technology of Silicon Materials 74-77. 2008.NIMS著者陳 君深田 直樹知京 豊裕Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 12:04:00 +0900 更新時刻: 2022-09-05 12:04:00 +0900
