Electron-beam-induced current characterization of high-k dielectrics
| 著者 | CHEN, Jun, SEKIGUCHI, Takashi, TAKASE, Masami, FUKATA, Naoki, CHIKYOW, Toyohiro, Ryu Hasunuma, Kikuo Yamabe, Motoyuki Sato, Yasuo Nara, Keisaku Yamada. |
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| 掲載誌名 | Proc. of the 5th International Symposium on Advanced Science and Technology of Silicon Materials 74-77 |
| 出版社 | |
| 出版年 | 2008 |
| 言語 | English |