HOME > Misc > DetailElectron-beam-induced current characterization of high-k dielectricsCHEN, Jun, SEKIGUCHI, Takashi, TAKASE, Masami, FUKATA, Naoki, CHIKYOW, Toyohiro, Ryu Hasunuma, Kikuo Yamabe, Motoyuki Sato, Yasuo Nara, Keisaku Yamada. Proc. of the 5th International Symposium on Advanced Science and Technology of Silicon Materials 74-77. 2008.NIMS author(s)CHEN, JunFUKATA, NaokiCHIKYO, ToyohiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-09-05 12:04:00 +0900Updated at: 2022-09-05 12:04:00 +0900
