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CHARACTERIZATION OF LEAKAGE BEHAVIORS OF HIGH-K GATE STACKS BY ELECTRON-BEAM-INDUCED CURRENT

CHEN, Jun, SEKIGUCHI, Takashi, FUKATA, Naoki, TAKASE, Masami, CHIKYOW, Toyohiro, Kikuo Yamabe, Ryu Hasunuma, Motoyuki Sato, Yasuo Nara, Keisaku Yamada.

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    作成時刻: 2022-09-05 12:02:44 +0900更新時刻: 2022-09-05 12:02:44 +0900

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