HOME > Misc > DetailCHARACTERIZATION OF LEAKAGE BEHAVIORS OF HIGH-K GATE STACKS BY ELECTRON-BEAM-INDUCED CURRENTCHEN, Jun, SEKIGUCHI, Takashi, FUKATA, Naoki, TAKASE, Masami, CHIKYOW, Toyohiro, Kikuo Yamabe, Ryu Hasunuma, Motoyuki Sato, Yasuo Nara, Keisaku Yamada. IEEE IRPS 2008 Proceedings 584-588. 2008.NIMS author(s)CHEN, JunFUKATA, NaokiCHIKYO, ToyohiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-09-05 12:02:44 +0900 Updated at: 2022-09-05 12:02:44 +0900
