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Surface morphology smoothing of a 2 inch-diameter GaN homoepitaxial layer observed by X-ray diffraction topography

RSC Advances 10 [4] 1878-1882. 2020.
Open Access Royal Society of Chemistry (RSC) (Publisher)

NIMS著者


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    作成時刻: 2020-03-13 03:00:19 +0900更新時刻: 2024-07-03 05:19:50 +0900

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