Characteristics of <i>β</i> -Ga <sub>2</sub> O <sub>3</sub> /Al <sub>2</sub> O <sub>3</sub> /Pt Capacitors with a Ga <sub>2</sub> O <sub>3</sub> Surface Modified Using the Dummy-SiO <sub>2</sub> Process | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Characteristics of β -Ga ₂ O ₃ /Al ₂ O ₃ /Pt Capacitors with a Ga ₂ O ₃ Surface Modified Using the Dummy-SiO ₂ Process

Toshihide Nabatame, Yoshihiro Irokawa, Tomomi Sawada, Hiromi Miura, Manami Miyamoto, Takashi Onaya, Yasuo Koide, Kazuhito Tsukagoshi.

ECS Journal of Solid State Science and Technology 15 [6] 064005. 2026.

https://doi.org/10.1149/2162-8777/ae7ac0

Open Access The Electrochemical Society (Publisher) Materials Data Repository (MDR)

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Materials Data Repository (MDR)上の本文・データセット

MDRavailable Characteristics of β-Ga2O3/Al2O3/Pt capacitors with a Ga2O3 surface modified using the dummy-SiO2 process

作成時刻: 2026-08-19 03:10:59 +0900 更新時刻: 2026-09-21 04:34:28 +0900

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