Experimental and theoretical studies on atomic structures of the interface states at SiO<sub>2</sub>/4H-SiC(0001) interface

Experimental and theoretical studies on atomic structures of the interface states at SiO2/4H-SiC(0001) interface

著者	Yoshiyuki Yamashita, Jun Nara, Efi Dwi Indari, Takahiro Yamasaki, Takahisa Ohno, Ryu Hasunuma.
掲載誌名	Journal of Applied Physics 131 [21] 215303 ISSN: 00218979, 10897550 ESIでのカテゴリ: PHYSICS
出版社	AIP Publishing
発表年	2022
言語	English
DOI	https://doi.org/10.1063/5.0093267
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