HOME > 論文 > 書誌詳細Ultrahigh Performance On-Chip Single Crystal Diamond NEMS/MEMS with Electrically Tailored Self-Sensing Enhancing ActuationMeiyong Liao, Liwen Sang, Tokuyuki Teraji, Satoshi Koizumi, Yasuo Koide. Advanced Materials Technologies 4 [2] 1800325. 2019.https://doi.org/10.1002/admt.201800325 NIMS著者廖 梅勇寺地 徳之小泉 聡Materials Data Repository (MDR)上の本文・データセット作成時刻: 2019-03-01 11:43:05 +0900 更新時刻: 2026-10-30 05:23:44 +0900