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Ultrahigh Performance On-Chip Single Crystal Diamond NEMS/MEMS with Electrically Tailored Self-Sensing Enhancing Actuation

Meiyong Liao, Liwen Sang, Tokuyuki Teraji, Satoshi Koizumi, Yasuo Koide.
Advanced Materials Technologies 4 [2] 1800325. 2019.
https://doi.org/10.1002/admt.201800325

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    Created at: 2019-03-01 11:43:05 +0900Updated at: 2024-03-31 01:17:11 +0900

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