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Single-crystal diamond microelectromechanical resonator integrating with magneto-strictive galfenol film for magnetic sensor

Zilong Zhang, Haihua Wu, Liwen Sang, Jian Huang, Yukiko Takahashi, Linjun Wang, Masataka Imura, Satoshi Koizumi, Yasuo Koide, Meiyong Liao.
Carbon 152 788-795. 2019.
https://doi.org/10.1016/j.carbon.2019.06.072

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    Created at: 2019-07-27 03:00:20 +0900 Updated at: 2026-10-07 04:45:10 +0900

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