Homoepitaxial diamond chemical vapor deposition for ultra-light doping | SAMURAI, NIMS Researchers Directory Service

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Homoepitaxial diamond chemical vapor deposition for ultra-light doping

T. Teraji, J. Isoya, K. Watanabe, S. Koizumi, Y. Koide.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 197-202. 2017.

https://doi.org/10.1016/j.mssp.2016.11.012

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2017-08-17 21:46:58 +0900 Updated at: 2026-10-29 05:19:10 +0900

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