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Electron-beam-induced current study of breakdown behavior of high-k gate MOSFETs

SEKIGUCHI, Takashi, CHEN, Jun, TAKASE, Masami, FUKATA, Naoki, CHIKYOW, Toyohiro, Motoyuki Sato, Ryu Hasunuma, Kikuo Yamabe, Yasuo Nar.
SOLID STATE PHENOMENA 461-466. 2010.

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    作成時刻: 2017-02-27 01:41:51 +0900更新時刻: 2024-04-02 06:39:45 +0900

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