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Galfenol-Ti-Diamond Multilayer MEMS Resonator for Magnetic Sensor Working up to 773 K

著者Z. Zhang, L. Sang, H. Wu, J. Huang, L. Wang, S. Koizumi, Y. Kodie, M. Liao.
発表誌名IEEE International Electron Devices Meeting (IEDM)
発表年2019
言語unknown
DOIhttps://doi.org/10.1109/iedm19573.2019.8993533

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