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Galfenol-Ti-Diamond Multilayer MEMS Resonator for Magnetic Sensor Working up to 773 K

Author(s)Z. Zhang, L. Sang, H. Wu, J. Huang, L. Wang, S. Koizumi, Y. Kodie, M. Liao.
Proceedings titleIEEE International Electron Devices Meeting (IEDM)
Year of publication2019
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Created at / Updated at2020-11-03 03:00:16 +0900 / 2020-11-03 03:00:36 +0900

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