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Galfenol-Ti-Diamond Multilayer MEMS Resonator for Magnetic Sensor Working up to 773 K
| Author(s) | Z. Zhang, L. Sang, H. Wu, J. Huang, L. Wang, S. Koizumi, Y. Kodie, M. Liao. |
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| Proceedings title | IEEE International Electron Devices Meeting (IEDM) |
| Year of publication | 2019 |
| Language | English |
| DOI | https://doi.org/10.1109/iedm19573.2019.8993533 |
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| Visibility | Internet |
| Created at / Updated at | 2020-11-03 03:00:16 +0900 / 2020-11-03 03:00:36 +0900 |