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AuthorFUKATA, Naoki, Naoyuki Saito, Shinya Ishida, Shigeki Yokono, CHEN, Jun, SEKIGUCHI, Takashi, HISHITA, Shunichi, Kouichi Murakami.
Titleイオン注入によるSiナノワイヤへの不純物ドーピング
(Impurity doping in Si nanowires by ion-implantation)
Event name2010年春季 第57回 応用物理学関係連合講演会
Year of publication2010
LanguageJapanese
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