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Electron-beam-induced current characterization of high-k dielectrics

陳 君, 関口 隆史, 高瀬 雅美, 深田 直樹, 知京 豊裕, 蓮沼隆, 山部紀久夫, 佐藤基之, 奈良安雄.
The 5th International Symposium on Advanced Science and Technolo. 2008.

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    Created at: 2017-01-08 04:53:18 +0900Updated at: 2017-07-10 20:21:22 +0900

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