HOME > Presentation > DetailElectron-beam-induced current characterization of high-k dielectrics陳 君, 関口 隆史, 高瀬 雅美, 深田 直樹, 知京 豊裕, 蓮沼隆, 山部紀久夫, 佐藤基之, 奈良安雄. The 5th International Symposium on Advanced Science and Technolo. 2008.NIMS author(s)CHEN, JunFUKATA, NaokiCHIKYO, ToyohiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-01-08 04:53:18 +0900Updated at: 2017-07-10 20:21:22 +0900