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MOVPE法による(111)面ダイヤモンド基板上のAlNの高品質化
(High-crystalline quality AlN growth on diamond (111) substrates by MOVPE)
第61回応用物理学会春季学術講演会. March 17, 2014-March 20, 2014.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:15:53 +0900 Updated at: 2017-07-10 21:50:34 +0900