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AuthorLIAO, Meiyong, ウ ハイファ, SANG, Liwen, TERAJI, Tokuyuki, IMURA, Masataka, KOIDE, Yasuo.
TitleUltrahigh Quality factor diamond MEMS resonator
Event name The 6th French Japanese workshop on diamond power devices
Year of publication2019
LanguageEnglish
External references

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