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エッチピット形成によるダイオード漏れ電流欠陥の検出
(Detection of leakage-current-inducing defects of diamond diodes)

先進パワー半導体分科会 第5回講演会. 2018.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at :2019-03-04 10:08:56 +0900 Updated at :2019-03-04 10:08:56 +0900

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