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低温オゾン酸化によるSiNWs中のB偏析抑制効果
(Suppression of B segregation in silicon nanowires by low temperature ozone-oxidation)
秋季第72回応用物理学会学術講演会. 2011.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:55:37 +0900Updated at: 2017-07-10 21:08:31 +0900