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Imaging of Leakage Sites in High-k Gate Electrode by using Electron-beam-induced Current Technique
International Conference onSolid State Devices and Materials. September 23, 2008-September 26, 2008. Invited
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Created at: 2017-02-14 11:16:58 +0900 Updated at: 2024-03-05 11:42:05 +0900