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著者名SEKIGUCHI, Takashi, CHEN, Jun, TAKASE, Masami, FUKATA, Naoki, CHIKYOW, Toyohiro.
タイトルImaging of Leakage Sites in High-k Gate Electrode by using Electron-beam-induced Current Technique
会議名International Conference onSolid State Devices and Materials
発表年2008
言語English
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