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NIMS Award Symposium 2026

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Improvement of electrical properties of Ga2O3/Al2O3/Pt capacitors using the ALD-dummy-SiO2 process

NABATAME, Toshihide, IROKAWA, Yoshihiro, SAWADA, Tomomi, 三浦 博美, 宮本 真奈美, ONAYA, Takashi, TSUKAGOSHI, Kazuhito.
38th International Microprocesses and Nanotechnology Conference (MNC 2025). November 17, 2025-November 20, 2025.

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Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2025-12-11 03:10:00 +0900 Updated at: 2025-12-11 03:10:00 +0900

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