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NIMS Awardシンポジウム2026

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Prospects and Challenges for further scaling of the capacitance equivalent thickness (CET) in high-k gate stacks toward the 2-nm technology node and beyond

Yukinori Morita, Takamasa Kawanago, Takefumi Kamioka, Yuichiro Mitani, NABATAME, Toshihide, ONAYA, Takashi, FUKATA, Naoki, JEVASUWAN, Wipakorn, TSUKAGOSHI, Kazuhito, Takuya Hoshii, Kasidit Toprasertpong, Atsushi Tamura, Koji Kita, Naoya Okada, Kenzo Manabe, Wataru Mizubayashi, Hiroyuki Ota, Takashi Matsukawa, Shinji Migita.
250th ECS Meeting, Symposium. 2026年10月25日-2026年10月29日. 招待講演

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Materials Data Repository (MDR)上の本文・データセット


    作成時刻: 2026-11-07 03:06:50 +0900 更新時刻: 2026-11-07 03:06:50 +0900

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