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Effect of atmospheric gas in the dummy-SiO2 technique on the characteristics of beta-Ga2O3/Al2O3/Pt capacitors

56th IEEE Semiconductor Interface Specialists Conference. December 10, 2025-December 13, 2025.

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Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2025-12-19 03:13:02 +0900 Updated at: 2025-12-19 03:13:02 +0900

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