Efficient etching of diamond by oxygen annealing toward high-Q factor diamond MEMS resonators
E-MRS Spring Meeting 2022
https://www.european-mrs.com/advanced-carbon-materials-emrs. 2022. 招待講演
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2022-07-21 03:17:03 +0900更新時刻: 2024-03-05 12:21:58 +0900