Efficient etching of diamond by oxygen annealing toward high-Q factor diamond MEMS resonators

チンユンリン, サンフアンイン, SANG, Liwen, KOIZUMI, Satoshi, KOIDE, Yasuo, Xiaoxi Liu, LIAO, Meiyong.

E-MRS Spring Meeting 2022 https://www.european-mrs.com/advanced-carbon-materials-emrs. May 30, 2022-June 03, 2022. Invited

Created at: 2022-07-21 03:17:03 +0900Updated at: 2024-03-05 12:21:58 +0900