Characterization of a GaN wafer and a homo-epitaxial layer by synchrotron X-ray topography techniques
著者 | SEO, Okkyun, KIM, Jaemyung, HIROI, Satoshi, IROKAWA, Yoshihiro, NABATAME, Toshihide, KOIDE, Yasuo, SAKATA, Osami. |
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会議名 | The 66th JSAP Spring Meeting, 2019 |
発表年 | 2019 |
言語 | English |