(Characterization of high-k dielectric films for MOSFET using Electron Beam Induced Current)
IUMRS-ICA 2010. 2010. 招待講演
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2017-01-08 04:53:11 +0900更新時刻: 2024-03-05 11:43:06 +0900