HOME > Presentation > Detail(Characterization of high-k dielectric films for MOSFET using Electron Beam Induced Current)関口 隆史, 陳 君, 知京 豊裕. IUMRS-ICA 2010. 2010. InvitedNIMS author(s)CHEN, JunCHIKYO, ToyohiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-01-08 04:53:11 +0900Updated at: 2024-03-05 11:43:06 +0900