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ダイヤモンドFETのための原子層堆積成長
(Atomic Layer Deposition Technique for Diamond-based Field Effect Transistors)
NIMS Conference 2013. 2013.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-26 20:41:47 +0900Updated at: 2017-12-27 21:24:52 +0900