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AuthorYAMAMOTO, Ippei, NABATAME, Toshihide, SAWADA Tomomi, OHI, Akihiko, KURISHIMA, Kazunori, DAO, Duy Thang, NAGAO, Tadaaki, CHIKYOW, Toyohiro, OGURA Atsushi, OHISHI Tomoji.
TitleTMA原料によるRutile-TiO2膜への酸素欠損の導入とその電気特性
(Oxygen vacancy into Rutile-TiO2 films introduced by TMA-ALD process and its electrical properties)
Event name日本金属学会 2014年秋季講演大会
Year of publication2014
LanguageJapanese
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