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ヘリウムイオン顕微鏡による加工と観察の紹介
(Helium Ion microscope: A tool for nanoscale patterning and insulator observation )
共用・計測合同シンポジウム2015. 2015-03-10.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 10:57:24 +0900 Updated at: 2017-07-10 22:06:45 +0900