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Pt触媒効果により酸素欠陥及び酸素を導入したAl2O3膜の特性
(Characteristics of Al2O3 film by introducing additional oxygen and oxygen vacancy using Pt catalytic effect)
APS March Meeting. March 13, 2017-March 17, 2017.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2018-09-27 11:29:32 +0900 Updated at: 2018-09-27 11:29:32 +0900