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超高品質因子を持つ単結晶ダイヤモンドMEMS振動子
(Single crystal diamond mechanical resonator with ultra-high quality factor)
第31回ダイヤモンドシンポジウム. 2017.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-10-12 22:29:19 +0900Updated at: 2018-06-05 14:14:01 +0900