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AuthorLIAO, Meiyong, Masaya Toda, SANG, Liwen, IMURA, Masataka, IKEDA, Naoki, Shuji Tanaka, KOIDE, Yasuo.
Title単結晶ダイヤモンド機械共振特性の研究
(Single crystal diamond mechanical resonators )
Event name2013年 第60回応用物理学会春季学術講演会
Year of publication2013
LanguageJapanese
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