Ferroelectric HfxZr1−xO2-based capacitors with controlled-oxidation surface of TiN bottom-electrode
| 著者 | ONAYA, Takashi, NABATAME, Toshihide, Yukinori Morita, Hiroyuki Ota, Shinji Migita, Koji Kita, NAGATA, Takahiro, TSUKAGOSHI, Kazuhito, Takashi Matsukawa. |
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| 会議名 | MNC 2022, 35th International Microprocesses and Nanotechnology Conference |
| 発表年 | 2022 |
| 言語 | English |